Design of Smart Three-Axis Force Sensor

Modeling and analysis of a three-component piezoelectric force sensor

This paper presents a mathematical model for the vibration analysis of a three-component piezoelectric force sensor. The cubic theory of weakly nonlinear electroelasticity is applied to the model for describing the electromechanical coupling effect in the piezoelectric sensing elements which operate in thickness-shear and thickness-stretch vibration modes. Hamilton's principle is used to derive...

Optimal design of dynamic multi–axis force/torque sensor

The measurement of time–varying forces and torques applied to flexible mechanical structures cannot be pursued by relying on quasi–static approximations. However the problem can be casted as a problem of system inversion, provided reliable models of the dynamic relationship among force/torques and measurement gauges are available. Within this framework, it is possible in particular to define op...

A Three-Axis Force Sensor for Dual Finger Haptic Interfaces

In this work we present the design process, the characterization and testing of a novel three-axis mechanical force sensor. This sensor is optimized for use in closed-loop force control of haptic devices with three degrees of freedom. In particular the sensor has been conceived for integration with a dual finger haptic interface that aims at simulating forces that occur during grasping and surf...

Three-axis Tactile Sensor

Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range

The first three-axis micro-force sensor with adjustable force range from ±20 μN to ±200 μN and sub-micro-Newton measurement uncertainty is presented. The sensor design, the readout electronics, the sensor characterization and an uncertainty analysis for the force predictions are described. A novel microfabrication process based on a double silicon-on-insulator (SOI) substrate has been developed...